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Three-dimensional flexible microprobe for recording the neural signal

Source: J. Micro/Nanolith. MEMS MOEMS 9, 031007 (2010); doi:10.1117/1.3455409

Published 23 July 2010

KEYWORDS and PACS
Keywords
PACS
  • 85.85.+j
    Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
  • 87.80.Ek
    Mechanical and micromechanical techniques (biophysical research methods)
  • 07.10.Cm
    Micromechanical devices and systems
  • 87.85.Wc
    Neural engineering (biomedical engineering)
  • 87.85.G-
    Biomechanics (biomedical engineering)
  • YEAR: 2010
PUBLICATION DATA
ISSN:
1553-9628 (online)
Publisher:
AIP is a member of CrossRef SPIE
Chang-Hsiao Chen, Shih-Chang Chuang, and Yu-Tao Lee
National Tsing Hua University, Institute of NanoEngineering and MicroSystems, Hsinchu 30013, Taiwan

Yen-Chung Chang
National Tsing Hua University, Institute of NanoEngineering and MicroSystems and Institute of Molecular Medicine and Department of Life Sciences, Hsinchu 30013, Taiwan

Shih-Rung Yeh
National Tsing Hua University, Institute of Molecular Medicine and Department of Life Sciences, Hsinchu 30013, Taiwan

Da-Jeng Yao
National Tsing Hua University, Institute of NanoEngineering and MicroSystems, Hsinchu 30013, Taiwan
We have designed, fabricated, and tested a novel three-dimensional (3-D) flexible microprobe used for recording the neural signals of lateral giant (LG) on the escape system of American crayfish. We report an electrostatic actuation process to fold the planar probes to be the arbitrary orientations of 3-D probes for neuroscience application. The batch assembly method based on electrostatic force techniques gave more simple fabrication compared to others. A flexible probe could reduce both the chronic inflammation response and material fracture when animal breathes or moves. Furthermore, the cortex corresponds to hypothetical cortical modules with mostly vertically organized layers of neurons. Therefore, the 3-D flexible probe suits to understand how the cooperative activity for different layers of neurons. Advisedly, we present a novel fabrication for the 3-D flexible probe by using Parylene technology. The mechanical strength of the neural probe is strong enough to penetrate into a biogel. At the end, the flexible probe was used to record neural signals of the LG cell from American crayfish. ©2010 Society of Photo-Optical Instrumentation Engineers
History: Received 30 November 2009; revised 1 May 2010; accepted 4 May 2010; published 23 July 2010
Permalink: http://dx.doi.org/10.1117/1.3455409

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