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Raman Spectroscopic Stress Evaluation of Femtosecond-Laser-Modified Region Inside 4H-SiC

Source: Appl. Phys. Express 3, 016603 (2010); doi:10.1143/APEX.3.016603

Issue Date: February 2010

PUBLICATION DATA
ISSN:
1553-9601 (online)
Publisher:
AIP is a member of CrossRef JSAP
Minoru Yamamoto
Department of Ecosystem Engineering, The University of Tokushima, 2-1 Minamijosanjima, Tokushima 770-8506, Japan

Manato Deki
Department of Ecosystem Engineering, The University of Tokushima, 2-1 Minamijosanjima, Tokushima 770-8506, Japan

Tomonori Takahashi
Department of Mechanical Engineering, The University of Tokushima, 2-1 Minamijosanjima, Tokushima 770-8506, Japan

Takuro Tomita
Department of Ecosystem Engineering, The University of Tokushima, 2-1 Minamijosanjima, Tokushima 770-8506, Japan

Tatsuya Okada
Department of Mechanical Engineering, The University of Tokushima, 2-1 Minamijosanjima, Tokushima 770-8506, Japan

Shigeki Matsuo
Department of Ecosystem Engineering, The University of Tokushima, 2-1 Minamijosanjima, Tokushima 770-8506, Japan

Shuichi Hashimoto
Department of Ecosystem Engineering, The University of Tokushima, 2-1 Minamijosanjima, Tokushima 770-8506, Japan

Makoto Yamaguchi
Japan Society for Promotion of Machine Industry, 1-1-12 Hachiman, Higashikurume, Tokyo 203-0042, Japan

Kei Nakagawa
Electrical and Electronic Engineering, Anan National College of Technology, 265 Aoki, Minobayashi, Anan, Tokushima 774-0017, Japan

Nobutomo Uehara
Electrical and Electronic Engineering, Anan National College of Technology, 265 Aoki, Minobayashi, Anan, Tokushima 774-0017, Japan

Masaru Kamano
Electrical and Electronic Engineering, Anan National College of Technology, 265 Aoki, Minobayashi, Anan, Tokushima 774-0017, Japan
A femtosecond (fs)-laser-modified region inside single-crystal silicon carbide was studied by micro-Raman spectroscopy. Higher and lower peak energy shifts of the transverse optical (TO) phonon mode, which correspond to compressive and tensile stresses, were observed. Mappings of peak energies and spectral widths of the TO phonon mode showed a clear correspondence with the distributions of strained layers observed by transmission electron microscopy. The maximum compressive and tensile stresses were estimated to be 1.4 and 0.4 GPa, respectively. This result indicates that the periodic strained layers contain many nano-voids which are formed by nano-explosions induced by fs laser irradiation. ©2010
Permalink: http://dx.doi.org/10.1143/APEX.3.016603
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