Nanogratings and nanoholes fabricated by direct femtosecond laser writing in chalcogenide glasses
Source: Opt. Express 18, 6885 (2010); doi:10.1364/OE.18.006885
Issue Date: August 2010
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Research ToolkitPACS
- 42.62.Cf
Industrial applications of lasers - 81.20.-n
Methods of materials synthesis and materials processing - 42.70.Ce
Optical glasses, quartz - 81.05.Kf
Glasses: fabrication, treatment, testing and analysis - 42.82.Cr
Optical fabrication techniques; lithography, pattern transfer (integrated optics) - 85.35.-p
Nanoelectronic devices - 81.07.-b
Nanoscale materials and structures: fabrication and characterization - YEAR: 2010
PUBLICATION DATA
1553-9601 (online)
OSA
We report on the fabrication of sub-wavelength nanostructures on the surface of As2S3 chalcogenide glasses by appropriately controlling the irradiation condition of single-beam direct femtosecond laser writing. Nanogratings with a period of 180 nm were realized by multipulse irradiation. More importantly controllable nanoholes as small as 200 nm in diameter (one quarter of the illumination wavelength) were, for the first time, achieved in As2S3 using direct laser writing by single-pulse irradiation.
©2010 Optical Society of America
(As supplied by publisher.)
| Permalink: | http://dx.doi.org/10.1364/OE.18.006885 |
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