Experimental aspects of multiharmonic-order coherent diffractive imaging
Source: J. Appl. Phys. 108, 023106 (2010); doi:10.1063/1.3462438
Published 26 July 2010
We describe some experimental aspects required for the implementation of a few-order high-harmonic source for coherent diffractive imaging in the extreme-ultraviolet region. Polychromatic high-angle diffractive images have been successfully processed for both periodic and aperiodic inorganic samples using a modified Gerchberg–Saxton algorithm and maximum-entropy-method refinement and reconstructions yielding a resolution of 100 nm can now be achieved at harmonic wavelengths around 32 nm.
©2010 American Institute of Physics
| History: | Received 21 April 2010; accepted 9 June 2010; published 26 July 2010 |
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http://link.aip.org/link/?JAPIAU/108/023106/1 |
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