Heating dynamics and extreme ultraviolet radiation emission of laser-produced Sn plasmas
Source: Appl. Phys. Lett. 96, 261501 (2010); doi:10.1063/1.3458696
Published 30 June 2010
The impact of 1.064 µm laser absorption depth on the heating and in-band (2% bandwidth) 13.5 nm extreme ultraviolet emissions in Sn plasmas is investigated experimentally and numerically. In-band emission lasting longer than the laser pulse and separation between the laser absorption and in-band emission region are observed. Maximum efficiency is achieved by additional heating of the core of the plasma to allow the optimal temperature to expand to a lower and more optically thin density. This leads to higher temperature plasma that emits less in-band light as compared to CO2 produced plasma sources for the same application.
©2010 American Institute of Physics
| History: | Received 17 February 2010; accepted 9 June 2010; published 30 June 2010 |
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http://link.aip.org/link/?APPLAB/96/261501/1 |
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