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Compact ultra-fast vertical nanopositioner for improving scanning probe microscope scan speed

Source: Rev. Sci. Instrum. 82, 123703 (2012); http://dx.doi.org/10.1063/1.3664613

Published 13 December 2011

KEYWORDS and PACS
Keywords
PACS
  • 07.79.-v
    Scanning probe microscopes and components
  • 02.70.Dh
    Finite-element and Galerkin methods
  • YEAR: 2011
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PUBLICATION DATA
ISSN:
1553-9601 (online)
Publisher:
AIP is a member of CrossRef AIP
Brian J. Kenton,1 Andrew J. Fleming,2 and Kam K. Leang1
1Department of Mechanical Engineering, University of Nevada Reno, Reno, Nevada 89557-0312, USA
2School of Electrical Engineering and Computer Science, University of Newcastle, NSW 2308, Australia
The mechanical design of a high-bandwidth, short-range vertical positioning stage is described for integration with a commercial scanning probe microscope (SPM) for dual-stage actuation to significantly improve scanning performance. The vertical motion of the sample platform is driven by a stiff and compact piezo-stack actuator and guided by a novel circular flexure to minimize undesirable mechanical resonances that can limit the performance of the vertical feedback control loop. Finite element analysis is performed to study the key issues that affect performance. To relax the need for properly securing the stage to a working surface, such as a laboratory workbench, an inertial cancellation scheme is utilized. The measured dominant unloaded mechanical resonance of a prototype stage is above 150 kHz and the travel range is approximately 1.56 µm. The high-bandwidth stage is experimentally evaluated with a basic commercial SPM, and results show over 25-times improvement in the scanning performance. ©2011 American Institute of Physics
History: Received 5 April 2011; accepted 31 October 2011; published 13 December 2011
Digital Object Identifier: http://dx.doi.org/10.1063/1.3664613

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