Permissions for Reuse

Table I. Measured atomic percentages from Auger spectra on SAMs covered by Al2O3 deposited via ALD (10  cycles), individual spectra are shown in Ref. 20. Spectra from samples without a SAM show no sulfur and only a weak carbon signal. ODT, MUD, MUA, and 4-mercaptobenzoic acid (MBA) all have strong sulfur and carbon peaks. All spectra were taken with a 20  kV, 10  nA beam on a PHI 700 scanning Auger nanoprobe.
	Sulfur	Carbon	Oxygen	Aluminum	Gold
DDT	2.3	31.2	0.5	2.6	63.4
No SAM	<0.1	3.9	35.7	27.6	32.7
ODT	1.8	20.0	21.6	18.5	38.0
MUD	0.2	7.0	35.6	25.5	31.7
MUA	0.3	8.0	34.6	25.2	31.9
MBA	0.4	8.4	34.3	25.6	31.4

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