December 2006, page 69

AFM imaging

Infinitesima has announced the addition of a large sample capability to its VideoAFM, an instrument that can deliver atomic force microscope real-time images at video-frame rates. The new, next-generation VideoAFM enables standard sample disks of up to 15-mm diameter to be measured with nanometer resolution because the microscope tip is also the resonant scanner. Video-rate images are produced at 15 or 25 frames per second and can be recorded and saved as a video file. The VideoAFM works in conjunction with existing AFMs without affecting their functionality. Once an area of interest on a large sample is found, traditional AFM scanning can begin without the disruption of having to change microscope tips and losing the area being studied. The VideoAFM can follow molecular processes with millisecond resolution. Infinitesima Ltd, Oxford Centre for Innovation, Mill Street, Oxford OX2 0JX, UK, http://www.infinitesima.com

Nanoscale indenter

Asylum Research has introduced the NanoIndenter module that allows for increased sensitivity and resolution of the company's MFP-3D atomic force microscope system. The new module enables depth and force to be measured using optimized AFM sensors that the company claims will eliminate inaccuracies present in other similar products. The module simply replaces the AFM's standard cantilever holder. The NanoIndenter consists of a flexure with a calibrated spring constant to which diamond tips are mounted. The flexure is attached to the MFP-3D head that moves the tip to the surface. Displacement is performed with a piezo actuator and measured with the AFM's optical detector and NPS nanopositioning sensors. Two models are available: standard (2000–3500 N spring constant) and low force (300–800 N). Asylum Research, 6310 Hollister Avenue, Santa Barbara, CA 93117, http://www.asylumresearch.com

FIB/SEM nanoscale analysis

Carl Zeiss SMT and SII NanoTechnology have jointly developed the XVision 300 focused ion beam/scanning electron microscope hybrid system to provide ultrahigh resolution, 3D-surface and -subsurface process inspection, and defect analysis on 300-mm wafers at the 65/45-nm design mode and beyond. The new workstation combines the unique optical properties of the Carl Zeiss Nano Technology Systems Gemini SEM with the high-precision and high-current FIB-cutting capabilities from SIINT to provide precision control of the cutting process during FIB operation in real time. The XVision 300 offers a new process in which a low-energy gallium-ion beam is applied during final FIB polishing to reduce any sample surface damage that occurs during preparation of lamellas for transmission electron microscopy. Carl Zeiss SMT Inc, Nano Technology Systems Division, One Zeiss Drive, Thornwood, NY 10594, http://www.smt.zeiss.com

Software for MEMS modeling

IntelliSense has upgraded its IntelliSuite family of MEMS and nano simulation tools with version 8.1, which adds several new enhancements to v8's architecture for MEMS modeling. Automatic meshing of complex structures includes two new smart mesh engines—automatic manhattan and nonmanhattan. Smart meshing can optimize the mesh size for both of those geometries. A new full 3D field emission microscope–based electromagnetics engine is well suited for RF MEMS simulation. The software is coupled with TEM (thermo-electro-mechanical) analysis capabilities. Electromechanically deformed structures can now be seamlessly simulated within a single software package. The TEM module incorporates features such as simulation of switch contact bounce and contact analysis with joule heating and piezo effects. IntelliSense, 600 West Cummings Park, Suite 2000, Woburn, MA 01801, http://www.intellisense.com

Digital camera system

The new DP20 digital camera from Olympus incorporates a two-megapixel CCD and offers total flexibility for microscopists. It does not require a PC and thus can interface directly with a monitor or projector. High-resolution (1600 × 1200 pixel) images can be displayed at a real-time rate of 15 frames per second. The camera's outstanding color reproducibility enables it to observe and record the subtlest color differences in samples. With a focusing indicator and the addition of a new panning 4 × digital zooming function, users can achieve faster and more accurate focusing, even at lower magnifications. Images can be stored at different resolutions onto a 4-gigabyte-sized CompactFlash card and then transferred to a PC via USB 2.0. Files can be downloaded and displayed using the Olympus DP20-DRV software. Olympus Life and Material Science Europa GmbH, Wendenstrasse 14-18, 20097 Hamburg, Germany, http://www.olympus-europa.com

Scanning probe microscope

Pacific Nanotechnology's Nano-R2, an upgrade of the company's Nano-R system, is a multipurpose scanning probe microscope for capturing images and making measurements of structures on the nanometer scale. The Nano-R2 has several new features, including dual LCD monitors, a 16/32-bit controller architecture, and advanced image acquisition software. It has been optimized for both novice and expert users through two versions of the software, X'pert and EZMode. The new AFM provides ease of probe replacement, probe alignment, and sample positioning. Users may choose between the conventional Light Lever AFM scanner and the Crystal Force Microscope scanner. The LL-AFM is best suited for visualizing nanostructures and making mode measurements, while the CFM is ideal for taking routine topographic and metrology measurements. Pacific Nanotechnology Inc, 3350 Scott Boulevard, Suite 29, Santa Clara, CA 95054, http://www.pacificnano.com

Measurements on nanometer RF devices

Cascade Microtech has made significant technological advances to its line of Infinity probes, thus making it possible for IC manufacturers to accurately probe smaller pads on denser RF devices. The improved probes now offer finer pitches (down to 50 µm), smaller contact areas, and higher frequency operation (up to 220 GHz). They enable repeatable, low-resistance contact on aluminum pads and differential measurements with low cross talk and minimize probe pad damage. The probes are ideal for measuring mixed signal MOS devices. They are frequently used for silicon and silicon-germanium semiconductor process characterization and tests of ultrahigh- frequency interconnects and of such devices as amplifiers, mixers, oscillators, multipliers, and switches. Cascade Microtech Inc, 2430 NW 206th Avenue, Beaverton, OR 97006, http://www.cascademicrotech.com

Environmental isolation chamber

Ambios Technology has released the Isochamber, an environmental isolation system designed for optimizing performance of atomic force microscopes and other surface-imaging tools. Factors limiting the nanoscale performance and resolution of those imaging and metrology instruments include mechanical, acoustic, and thermal noise introduced by ordinary laboratory environments. The Isochamber isolates sensitive instrumentation from building vibrations, interior acoustic noise, and thermally induced drift. It offers 30 dB of acoustic isolation, most effectively in the speech region of 100–5000 Hz, but will attenuate acoustic disturbances well outside that region. It also features Minus K Technology's integrated 0.5-Hz vertical and 1.5-Hz horizontal frequency vibration isolation platform. Ambios Technology Inc, 100 Pioneer Street, Suite A, Santa Cruz, CA 95060, http://www.ambiostech.com

High-speed nanopositioning stages

Mad City Labs has produced the Nano-View/M with multi-axis, high-speed nanopositioning stages. The integral Nano-PDQ two-axis and three-axis nanopositioners feature a 2-ms step response over the full 75 µm of motion in xy travel and 50 µm in z. Positioning resolution is 0.1 nm with the standard analog control inputs and with the optional 20-bit USB digital interface added to the Nano-Drive closed-loop controller. The interface is provided with software drivers. Unlike common rack-and-pinion stages, the high internal preloads of the Nano-View/M prevent xy drift, which may be produced by high-speed scanning of the micropositioner. A compact optical breadboard (see photo) can be added to the system to provide a convenient mounting location for probes and other apparatus. Mad City Labs Inc, 2524 Todd Drive, Madison, WI 53713, http://www.madcitylabs.com

Filter membrane

Pall Microelectronics has introduced the Excellar ER, a 0.02-µm-rated filter that provides enhanced retention for improved contamination control, especially for 65- and 45-nm device generations. The newest addition to the company's UltiKleen Excellar family of PTFE (polytetrafluoroethylene) non-dewetting filter membranes helps support the complete range of filtration needs in critical wafer-cleaning applications, down to the 20-nm size of particle removal. Pall designed the filters for the aqueous-based, gas-generating chemicals used in wafer cleaning. A method of making PTFE less hydrophobic without the addition of a fluorinated surface coating prevents Excellar ER filters from forming dry spots, which can negatively affect process uniformity and result in increased surface roughness and defects. Pall Microelectronics, 25 Harbor Park Drive, Port Washington, NY 11050, http://www.pall.com

Direct-drive rotary stages

Aerotech's AMG LP series of low-profile gimbal mounts provide ultraprecise angular position, rate, and acceleration for such applications as directing optics, lasers, antennas, and sensors. The direct-drive rotary stages enable the LP series to provide speeds and accelerations that Aerotech claims are higher than those of competing products of the same size. Direct-drive torque motors—the company's high-torque S-series brushless, slotless models—with rare-earth magnets and high-accuracy angular transducers are coupled directly to shafts for smooth 360° continuous rotation of azimuth and elevation. Low-profile bearings maximize performance with respect to wobble, moment stiffness, and rotating friction. Aerotech Inc, 101 Zeta Drive, Pittsburgh, PA 15238-2897, http://www.aerotech.com

Mobile robotic platforms

Powerhouse has introduced for robot competition a new line of mobile robotic platforms known as BattleKits that are available in four sizes, with lengths from 16 in. to 30 in. and weights from 26 lbs to 90 lbs; the payload capacity is up to 600 lbs for the largest units. Optional batteries, powerful motors, and the company's AmpFlow speed controllers are offered for each size. The robots can be either remotely operated by radio control or computer controlled through a simple interface. The robotic platforms are ideal for use in hazardous substance handling, materials management in manufacturing, and automatic guided vehicles, and as tools for developing robotic sensing and intelligence technologies in the laboratory and in the classroom. Powerhouse, 1540 Winding Way, Belmont, CA 94002, http://www.battlekits.com

Hybrid nanopositioning stage

Physik Instrumente has announced the M-511.HD hybrid nanopositioning translation stage, which combines the advantages of electromagnetic and piezoelectric drives. The integration of piezo actuators in classical motorized micropositioners allows the combining of travel ranges of hundreds of millimeters with resolutions in the nanometer range. The servo-control loops for both the motorized and piezo drives use the same position sensor. The result is a motion system that, depending on the stage, achieves a minimum incremental motion or a repeatability of 4 nm over the entire travel range. The new system provides velocities to 125 mm/s, active compensation of backlash and stick/slip during startup and settling, and millisecond settling to nanometer accuracy. Physik Instrumente LP, 16 Albert Street, Auburn, MA 01501, http://www.pi-usa.us

Linear positioning stage

The tiny SQL-3405 from New Scale Technologies is a motorized linear positioning stage that delivers automated set-and-hold micropositioning for biological research, optical instruments, and other applications in which space is at a premium. The SQL-3405 stage is driven by the company's integral piezoelectric Squiggle motor, which provides precise incremental motion of 100 nm. The Squiggle motor uses a threaded nut and screw; piezoelectric ceramics create ultrasonic vibrations in the nut, causing the screw to rotate and translate. A position sensor in the stage enables closed-loop control with a resolution of 10 µm. The stage features an axial load (push force) of 2 N, a holding force of 5 N, a travel range of 5 mm, and a maximum speed of 5 mm/s. New Scale Technologies Inc, 111 Victor Heights Parkway, Victor, NY 14564, http://www.newscaletech.com

New literature

Alfa Aesar, a Johnson Matthey Company, has published a brochure entitled Nanoparticles and Dispersions, which features products from Nanophase Technologies. Alfa Aesar, the sole global distributor of the products, is promoting the availability of sample sizes to a broad research and development audience. Alfa Aesar, 26 Parkridge Road, Ward Hill, MA 01835, http://www.alfa.com

On the Web

Users of the Malvern Instruments website can quickly determine the minimum sample concentration required to measure a protein by using the Zetasizer Nano Minimum Concentration Calculator. Determinations can be made of sizing, zeta potential, and molecular weight. Malvern Instruments Inc, 10 Southville Road, Southborough, MA 01772, http://www.malvern.com

Melles Griot has added to its online catalog the full line of modular ScienceDesk workstations and optical tabletops, which feature excellent surface flatness, minimum relative motion, low dynamic deflection, and a unique athermalized design for high thermal stability. Melles Griot, Photonics Components Group, 2051 Palomar Airport Road, 200, Carlsbad, CA 92011, http://www.mellesgriot.com