The Journal of Vacuum Science and Technology B

The Journal of Vacuum Science and Technology B

Microelectronics and Nanometer Structures: Processing, Measurement, and Phenomena

The Journal of Vacuum Science and Technology B is devoted to reports of original research, review articles, and Critical Review articles. The JVST B has been established to provide a vehicle for the publication of research dealing with microelectronics and nanometer structures.

New Top 20 Downloaded Articles (Monthly)

Table of Contents Alerts

Information on RSS Feeds

RSS Content Feed

Free Online Color for The Journals of Vacuum Science and Technology B.
Accelerated Articles Now Available for JVST B Online
Journal of Vacuum Science and Technology (1964-1982)
search Scitation	search SPIN database	MyScitation

RETRIEVE ARTICLE

BROWSE

Current Issue
( January 2010 )

Issue Archive
(Jan./Feb. 1983 - Present)

Current Issue
( January 2010 )

Issue Archive
(Sept./Oct. 1964 - Present)

Buyers Guide

JVST Media Kit
for 2010