The Journal of Vacuum Science and Technology B

The Journal of Vacuum Science and Technology B

Microelectronics and Nanometer Structures: Processing, Measurement, and Phenomena

The Journal of Vacuum Science and Technology B is devoted to reports of original research, review articles, and Critical Review articles. The JVST B has been established to provide a vehicle for the publication of research dealing with microelectronics and nanometer structures.

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Journal of Vacuum Science and Technology (1964-1982)
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(Jan./Feb. 1983 - Present)

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