Characterization and Metrology for ULSI Technology

1998 International Conference on Characterization and Metrology for ULSI Technology

David G. Seiler, National Institute of Standards and Technology, Semiconductor Electronics Division, Gaithersburg, MD, USA ; W. Murray Bullis, SEMI, USA ; Thomas J. Shaffner, National Institute of Standards and Technology, Semiconductor Electronics Division, Gaithersburg, MD, USA ; Robert McDonald, Technology Associates, Monte Sereno, CA, USA ; E. Jane Walters, National Institute of Standards and Technology, Semico;nductor Electronics Division, Gaithersburg, MD, USA ; Alain C. Diebold, College of Nanoscale Science and Engineering, SUNY Albany, Albany, New York, USA

Conference Location and Date: Gaithersburg, MD, USA, 23-27 March 1998

Published ; ISBN 1-56396-753-7, One Volume, Print; 0 pages; $195.00

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