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CHARACTERIZATION AND METROLOGY FOR ULSI TECHNOLOGY: 1998 International Conference

David G. Seiler, National Institute of Standards and Technology, Semiconductor Electronics Division, Gaithersburg, MD, USA ; Alain C. Diebold, University at Albany, College of Nanoscale Science and Engineering, Albany, NY, USA ; W. Murray Bullis, SEMI, International Standards, Mountain View, CA, USA ; Thomas J. Shaffner, National Institute of Standards and Technology, Semiconductor Electronics Division, Gaithersburg, MD, USA ; Robert McDonald, Technology Associates, Monte Sereno, CA, USA ; E. Jane Walters, National Institute of Standards and Technology, Semico;nductor Electronics Division, Gaithersburg, MD, USA


AIP Conference Proceedings 449


Conference Location and Date: Gaithersburg, Maryland, 1 March - 1998

Subseries: None

Published November 1998; ISBN 1-56396-753-7 One Volume Print, CD-ROM included; 976 pages; $195.00

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