RSI: SENSORS AND ACTUATORS/MEMS/NEMS http://scitation.aip.org/ RSI: SENSORS AND ACTUATORS/MEMS/NEMS Transducer for mechanical impedance testing over a wide frequency range through active feedback http://link.aip.org/link/?RSI/83/025001/1&agg=rss Michael Wiertlewski and Vincent Hayward<br/> We describe a feedback-controlled active mechanical probe which can achieve a very low mechanical impedance, uniformly over a wide frequency range. The feedback produces a state of quasi-resonance which transforms the probe into a source of force used to excite an unknown load, resulting in a precis ... [Rev. Sci. Instrum. 83, 025001 (2012)] published Mon Feb 13, 2012. Dynamic thermomechanical response of bimaterial microcantilevers to periodic heating by infrared radiation http://link.aip.org/link/?RSI/83/015003/1&agg=rss Beomjin Kwon, Matthew Rosenberger, Rohit Bhargava, David G. Cahill, and William P. King<br/> This paper investigates the dynamic thermomechanical response of bimaterial microcantilevers to periodic heating by an infrared laser operating at a wavelenegth of 10.35 [mu]m. A model relates incident radiation, heat transfer, temperature distribution in the cantilever, and thermal expansion mismat ... [Rev. Sci. Instrum. 83, 015003 (2012)] published Tue Jan 31, 2012. Fast on-wafer electrical, mechanical, and electromechanical characterization of piezoresistive cantilever force sensors http://link.aip.org/link/?RSI/83/015002/1&agg=rss G. Tosolini, L. G. Villanueva, F. Perez-Murano, and J. Bausells<br/> Validation of a technological process requires an intensive characterization of the performance of the resulting devices, circuits, or systems. The technology for the fabrication of micro and nanoelectromechanical systems (MEMS and NEMS) is evolving rapidly, with new kind of device concepts for appl ... [Rev. Sci. Instrum. 83, 015002 (2012)] published Wed Jan 11, 2012. Influence of piezoceramic to fused silica plate thickness on the radii of curvature of piezoelectric bimorph mirror http://link.aip.org/link/?RSI/83/015001/1&agg=rss M. Libu, S. Susanth, K. G. Vasanthakumari, C. J. Dileep Kumar, and N. Raghu<br/> Piezoelectric based bimorph mirrors (PBM) find extensive use in focusing of x-ray beams. Many optical instruments require use of PBM whose radii of curvature can be tuned precisely. The 100 mm and 300 mm PBMs were fabricated with varying piezoelectric to fused silica plate thicknesses. The radii of ... [Rev. Sci. Instrum. 83, 015001 (2012)] published Tue Jan 3, 2012. Torsional bridge setup for the characterization of integrated circuits and microsensors under mechanical shear stress http://link.aip.org/link/?RSI/82/125002/1&agg=rss M. Herrmann, P. Gieschke, P. Ruther, and O. Paul<br/> We present a torsional bridge setup for the electro-mechanical characterization of devices integrated in the surface of silicon beams under mechanical in-plane shear stress. It is based on the application of a torsional moment to the longitudinal axis of the silicon beams, which results in a homogen ... [Rev. Sci. Instrum. 82, 125002 (2011)] published Thu Dec 15, 2011. Prediction of atomic force microscope probe dynamics through the receptance coupling method http://link.aip.org/link/?RSI/82/125001/1&agg=rss M. Mehrpouya and S. S. Park<br/> The increased growth in the use of tip-based sensing, manipulations, and fabrication of devices in atomic force microscopy (AFM) necessitates the accurate prediction of the dynamic behavior of the AFM probe. The chip holder, to which the micro-sensing device is attached, and the rest of the AFM syst ... [Rev. Sci. Instrum. 82, 125001 (2011)] published Wed Dec 7, 2011. Micromachined fragment capturer for biomedical applications http://link.aip.org/link/?RSI/82/115004/1&agg=rss Young-Soo Choi and Dong-Weon Lee<br/> Due to changes in modern diet, a form of heart disease called chronic total occlusion has become a serious disease to be treated as an emergency. In this study, we propose a micromachined capturer that is designed and fabricated to collect plaque fragments generated during surgery to remove the thro ... [Rev. Sci. Instrum. 82, 115004 (2011)] published Wed Nov 23, 2011. A novel compensation method of insertion losses for wavelet inverse-transform processors using surface acoustic wave devices http://link.aip.org/link/?RSI/82/115003/1&agg=rss Wenke Lu and Changchun Zhu<br/> The objective of this research was to investigate the possibility of compensating for the insertion losses of the wavelet inverse-transform processors using SAW devices. The motivation for this work was prompted by the processors which are of large insertion losses. In this paper, the insertion loss ... [Rev. Sci. Instrum. 82, 115003 (2011)] published Thu Nov 17, 2011. Electroplated CoPt magnets for actuation of stiff cantilevers http://link.aip.org/link/?RSI/82/115002/1&agg=rss Y. C. Loke, W. Hofbauer, P. Lu, K. Ansari, X. S. Tang et al.<br/> A cantilever has been microfabricated for use in non-contact Atomic Force Microscopy (AFM) using a very thick magnetic film to actuate the cantilever motion. The thick magnetic block is deposited electrochemically over a defined area of the cantilever. This cantilever is particularly suitable for dr ... [Rev. Sci. Instrum. 82, 115002 (2011)] published Thu Nov 10, 2011. Versatile computer-controlled system for characterization of gas sensing materials http://link.aip.org/link/?RSI/82/105001/1&agg=rss M. Zhao, J. X. Huang, M. H. Wong, Y. M. Tang, and C. W. Ong<br/> Design of a system used for characterizing gas sensing materials is described. It is distinctive of being able to measure electrical and optical responses of a sample simultaneously, control a number of measurement parameters, perform fast exchange of gaseous environment, and be fully controlled aut ... [Rev. Sci. Instrum. 82, 105001 (2011)] published Thu Oct 20, 2011.