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Parallel combinatorial chemical synthesis using single-layer poly(dimethylsiloxane) microfluidic devices
Improving methods for high-throughput combinatorial chemistry has emerged as a major area of research because of the importance of rapidly synthesizing large numbers of chemical compounds for drug dis...

Polydimethylsiloxane-integratable micropressure sensor for microfluidic chips

Biomicrofluidics 3, 034105 (2009); doi:10.1063/1.3230500

Published 17 September 2009

Limu Wang, Mengying Zhang, Min Yang, Weiming Zhu, Jinbo Wu, Xiuqing Gong, and Weijia Wen
Department of Physics and KAUST-HKUST Micro/Nano-fluidics Joint Laboratory, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong, People's Republic of China
A novel microfluidic pressure sensor which can be fully integrated into polydimethylsiloxane (PDMS) is reported. The sensor produces electrical signals directly. We integrated PDMS-based conductive composites into a 30  µm thick membrane and bonded it to the microchannel side wall. The response time of the sensor is approximately 100 ms and can work within a pressure range as wide as 0–100 kPa. The resolution of this micropressure sensor is generally 0.1 kPa but can be increased to 0.01 kPa at high pressures as a result of the quadratic relationship between resistance and pressure. The PDMS-based nature of the sensor ensures its perfect bonding with PDMS chips, and the standard photolithographic process of the sensor allows one-time fabrication of three dimensional structures or even microsensor arrays. The theoretical calculations are in good agreement with experimental observations. ©2009 American Institute of Physics
History: Received 20 July 2009; accepted 25 August 2009; published 17 September 2009
Permalink: http://link.aip.org/link/?BIOMGB/3/34105/1
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KEYWORDS and PACS

Keywords
PACS
  • 87.80.Ek
    Mechanical and micromechanical techniques (biophysical research methods)
  • 85.85.+j
    Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
  • 85.40.Hp
    Lithography, masks and pattern transfer (microelectronics)
  • 47.61.Fg
    Flows in micro-electromechanical systems (MEMS) and nano-electromechanical systems (NEMS)
  • 47.85.Np
    Fluidics (applied)
  • YEAR: 2009

PUBLICATION DATA

ISSN:
1932-1058 (online)
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AIP is a member of CrossRef AIP

REFERENCES (26)
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